top of page
Wafer Cassette Inspection System
Smart Camera
.png)
Wafer cassette carriers are widely used in semiconductor fabs to transport and store wafers between process tools. Accurate wafer counting and presence inspection inside these cassettes is critical to prevent missing wafers, double loading, or incorrect slot placement, which can lead to process interruption and yield loss.
A 2D smart vision camera enables non-contact inspection of wafer cassette carriers by capturing images of each slot and verifying wafer presence and count in real time. It ensures correct loading before and after process transfer, improves material handling accuracy, and supports reliable automation in semiconductor manufacturing environments.
bottom of page
.png)